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Agilent TwisTorr 84 FS

AllVacuum ProductsTurbo PumpsAgilent / Varian

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The Agilent 80 L/s turbo pump, TwisTorr 84 FS, combines TwisTorr drag stage technology and Agilent Floating Suspension (FS) to provide high performance, reliability, and economy. This 80 L/s turbo pump delivers high vacuum performance thanks to the synergy between turbo technology and innovative TwisTorr drag stages. Floating Suspension assures low vibration and acoustical noise for compatibility with sensitive instrumentation and work environments.

This small turbo pump is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research and electron microscopy.

The TwisTorr 84 FS is available with onboard or rack controllers.



Features
 

  • Innovative TwisTorr technology - High compression ratio for light gases and very compact rotor design provides high performance and minimal system footprint.
  • High Foreline Tolerance - Permits use of smaller backing pump, thereby reducing system cost and size.
  • Agilent Floating Suspension - Low vibration and acoustical noise, optimal bearing working conditions, extended operating life all optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
  • Unique bearing & dry lubrication - Maintenance free, oil free; allows installation in any orientation.
  • Copper water cooling channel (optional) - Eliminates corrosion risk and optimizes heat transfer, and reduces water consumption and cost of ownership.
  • Typical Turbo Pump Applications 
  • Download 84 FS 3D Models
Specifications

Technical Specifications

Pumping speed:
With CFF 4 ½” or ISO 63: With CFF 2 ¾”: With KF 40:

N2: 67 l/s
N2: 56 l/s
N2: 49 l/s

He: 63 l/s/
He: 46 l/s
He: 38 l/s

H2: 53 l/s
H2: 40 l/s
H2: 36 l/s

Ar: 66 l/s
Ar: 57 l/s
Ar: 44 l/s
Gas throughput at full rotational speed (with recommended forepump)
Air cooling (35 °C)
Water cooling (25 °C, 65 l/h)		 N2: 100 sccm
N2: 100 sccm		 Ar: 70 sccm
Ar: 70 sccm		    
Compression ratio: N2: ≥1 x 1011 He: 2 x 106 H2: 5 x 104 Ar: >1 x 1011
Base pressure* (with recommended forepump) <5 x 10-10 mbar (< 3.75 x 10-10 Torr)      
Inlet flange CFF 4 ½” O.D.
CFF 2 ¾” O.D.		 ISO 63
KF40		    
Foreline flange KF 16 NW      
Rotational speed  81,000 rpm (1350 Hz driving frequency)      
Start-up time <2 minutes      
Recommended forepump Mechanical: Agilent DS 40M - DS 102
Dry pump: Agilent IDP-3, SH 110		      
Operating position Any      
Operating ambient temperature +5 °C to +35 °C      
Relative humidity of air 0 - 90 % (not condensing)      
Bakeout temperature
120 °C at inlet flange max. (CFF flange)
80 °C at inlet flange max. (ISO flange)
      
Lubricant
Permanent lubrication
 
      
Cooling requirements Air Cooling:
Water Cooling:		 Air flow temperature +5 °C to +35 °C
Cooling water temperature: +15 °C to +25 °C

Minimum flow: 65 l/h (0.30 GPM)

Pressure: 2 to 4 bar (45 to 75 psi)		    
Noise pressure level (at 1 mt at full speed) 40 dB(A) *      
Storage temperature -40 °C to +70 °C      
Max altitude 3000 m      
Certifications CE, C-CSA-US, RoHS compliant as per 2011/65/UE      
Weight kg (lbs):
Pump ISO 63:
2.5 (5.5)
 
 
 
 
Pump CFF 4½” :
3.5 (7.7)
 
 
 
 
Pump CFF 2 ¾”:
3.34 (7.35)
Pump KF 40:
2.37 (5.22)
 
* Average value ± 4 dB(A) std deviation
Ordering Information

Pumps                                                                                       Configuration Options
TwisTorr 84 FS ISO 63                                                              X3502-64000
TwisTorr 84 FS KF 40                                                               X3502-64001
TwisTorr 84 FS CFF 4.5”                                                           X3502-64002
TwisTorr 84 FS CFF 2.75”                                                         X3502-64003
 
Controllers                                                                                 Part Numbers
TwisTorr 84 FS AG Rack controller RS232/485                        X3508-64001
TwisTorr 84 FS AG Rack controller Profibus                             X3508-64002
TwisTorr 84 FS onboard controller 110/220V                            X3509-64000
TwisTorr 84 FS onboard controller 24V                                     X3509-64001
TwisTorr 84 FS PCB Controller                                                 X3510-64000

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1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.

+6011-6528 1088
+604-611 1186
+6012-954 1088

+6012-558 2052

sales@hexoind.com

+60125582052
+60129541088

https://www.hexoind.com

© 2019 - 2024 Hexo Industries (M) Sdn Bhd      201101011453 (Co. No. 939586T / 201101011453)        
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