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Agilent TwisTorr 804 FS

AllVacuum ProductsTurbo PumpsAgilent / Varian

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The Agilent 800 L/s turbomolecular pump, TwisTorr 804 FS, combines TwisTorr drag stage technology and Agilent Floating Suspension (FS) to provide high performance, reliability and economy. This turbo pump delivers high vacuum performance thanks to the synergy between turbo technology and innovative TwisTorr drag stages. Floating Suspension assures low vibration and acoustical noise for compatibility with sensitive instrumentation and work environments.

This 800 L/s turbomolecular pump with ISO 200K, 250K and CFF 10 in inlet flanges, is perfectly suited for a wide range of applications, including research and development, UHV systems, nuclear research, ion implanters, surface analysis, electron microscopy, and cryogenics.

Agilent also provides TwisTorr FS-OS turbo pumps, designed for academia, research, and other applications that require long-term operation in demanding conditions.

The TwisTorr 804 FS is available with onboard or rack controllers.

View the image gallery to learn more about the TwisTorr 804 FS Turbo Pump.

Features

  • Innovative TwisTorr technology - high compression ratio for light gases provides high performance and minimal system footprint.
  • High foreline tolerance - permits use of smaller backing pump, thereby reducing system cost and size.
  • Agilent Floating Suspension - low vibration and acoustical noise as well as optimal bearing working conditions extend operating life to optimize cost-of-ownership, minimize system downtime, and assure stable performance over time.
  • Unique bearing and dry lubrication - maintenance free, oil free; allows installation in any orientation.
  • “Three dimensional” pump control software provides maximum flexibility, speed, and simplicity - for the best throughput and compression performance according to the operating conditions of the pump.
  • Typical Turbo Pump Applications 
  • Download TwisTorr 804 FS 3D Models
Specifications

Pumping speed: ISO200K-F
ISO250K-F
 CFF10
N2
He
H2
Ar		 720 L/s
660 L/s
485 L/s
690 L/s		    
Max Gas Throughput(*) Air Cooling
(25°C Air temperature)		 Water Cooling
(15°C Water temperature / 25°C room temperature)		  
N2 4.3 mbarL/s
255 SCCM		 6.1 mbar L/s
367 SCCM		  
He 7.9 mbar L/s
467 SCCM		 10.4 mbar L/s
615 SCCM		  
Ar 1.5 mbar L/s
89 SCCM		 3.3 mbar L/s
195 SCCM		  
(*) Backing pump 11.6 m3/hr      
Compression ratio and foreline tolerance*      
N2
He
H2
Ar		 >1E+11
2E+08
3E+06
1E+11		 10 mbar
10 mbar
4 mbar
8.5 mbar		  
(*) Foreline Tolerance defined as the pressure at which the turbopump still produce a compression of 100 and estimated in water cooling mode      
Base pressure with recomm. forepump < 1 x 10-10 mbar
(< 1 x 10-10 Torr)		    
Inlet flange ISO 200K, ISO 200F, ISO 250K,
ISO 250F, CFF 10”		    
Foreline flange NW25 or NW40    
Recommended forepump DS302
IDP10
IDP15		    
Operating position Any    
Oper. ambient temperature +5 °C to +35 °C    
Lubricant Permanent grease lubrication    
Cooling requirements      
Air cooling Air temperature from +5°C to 35°C    
Water cooling Water temperature from +15°C to +25°C
Water flow min. 100L/h		    
Noise Pressure Level
(at 1m at full speed)		 43dB(A)
Ordering Information
 
Pumps                                                                                                       Configuration Options
TwisTorr 804 FS ISO200K KF25 air cooling                                               X3511-64007
TwisTorr 804 FS ISO200K KF40 air cooling                                               X3511-64008
TwisTorr 804 FS ISO200F KF25 air cooling                                               X3511-64009
TwisTorr 804 FS ISO200F KF40 air cooling                                               X3511-64010
TwisTorr 804 FS CFF10'' KF25 air cooling                                                 X3511-64011
TwisTorr 804 FS CFF10'' KF40 air cooling                                                 X3511-64012
TwisTorr 804 FS ISO250K KF40 air cooling                                               X3511-64013
TwisTorr 804 FS ISO250F KF40 air cooling                                               X3511-64014
TwisTorr 804 FS ISO200K KF25 water cooling                                          X3511-64022
TwisTorr 804 FS ISO200K KF40 water cooling                                          X3511-64023
TwisTorr 804 FS ISO200F KF25 water cooling                                          X3511-64024
TwisTorr 804 FS ISO200F KF40 water cooling                                          X3511-64025
TwisTorr 804 FS CFF10'' KF25 water cooling                                            X3511-64026
TwisTorr 804 FS CFF10'' KF40 water cooling                                            X3511-64027
TwisTorr 804 FS ISO250K KF40 water cooling                                          X3511-64028
TwisTorr 804 FS ISO250F KF40 water cooling                                          X3511-64029
 
Controllers                                                                                               Part Numbers
TwisTorr Medium-TMP Rack Controller                                                    X3501-64016
TwisTorr Medium-TMP on board Controller                                              X3512-64016

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1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.

+6011-6528 1088
+604-611 1186
+6012-954 1088

+6012-558 2052

sales@hexoind.com

+60125582052
+60129541088

https://www.hexoind.com

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