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SpectrumSense Solutions
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Agilent / Varian Turbo-V 1K-G
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Turbo-V 1K-G
This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.
The pump's robust design and its advanced electronics, rack type or onboard solution, make the Agilent Turbo-V 1K-G the optimum pumping solution for the vacuum coating industry.
Features
- Application-specific pumping solution designed for thin film deposition equipment
- High Pumping speed and high gas throughput
- Rugged design and highly efficient cooling system for continuous operation
- Gas Purge for bearing protection
- Rack type of Navigator on board controllers
- Versatile electronics interface with easy-to-use control Software
- Analog I/O signals and RS232 / RS485 interface as standard Agilent Profibus interface as option
- Typical Turbo Pump Applications
Specifications
Technical Specifications
|
Pumping speed: ISO 160: ISO 200: |
Ar: 750 l/s
Ar: 1,040 l/s
|
N2: 810 l/s
N2: 1,080 l/s
|
He: 950 l/s/
He: 1,150 l/s
|
H2: 680 l/s
H2: 730 l/s
|
| Compression ratio: | Ar: 5 x 108 | N2: 5 x 107 | He: 4 x 104 | H2 1.5 x 104 |
| Base pressure* (with recommended forepump) | <1 x 10-10 mbar | |||
| Inlet flange | ISO 160F, ISO 200F | |||
|
Foreline flange ISO 160: ISO 200: |
KF 25 NW KF 40 NW |
|||
| Nominal rotational speed | 45,500 rpm | |||
| Start-up time | <5 minutes | |||
| Minimum recommended forepump | > 20 m3/h (TriScroll 600, DS 602) | |||
| Operating position | Any | |||
| Operating ambient temperature | +5 °C to +35 °C | |||
| Bakeout temperature |
80 °C at inlet flange max. (ISO flange)
|
|||
| Vibration level (displacement) |
<0.01 μm at inlet flange
|
|||
| Cooling requirements | Water | |||
|
Power supply Input voltage: 100-240 Vac Max operating power: |
< Input freq.: 50 - 60 Hz 400 W using Nitrogen and lighter gases (water cooling setting) 260 W using Argon (air cooling setting) |
Max input power: 600 VA | Stand-by power: 30 to 35 W | |
| Protection fuse (Navigator controller) | 1 x 6.3 A | |||
| Serial communication (Navigator Kit) | RS232 cable with a 9-pin D type | male connector and a 9-pin D type female connector, and Navigator software (optional) | ||
| Storage temperature | -20 °C to +70 °C | |||
| Weight |
26.8 kg (59.1 lbs)
|
|
|
|
* According to standard DIN 28 428.
Literature
A-PLUS software release 2.0.2
A-PLUS software (formerly T-plus) - release 2.0.2 - communication, control and monitoring software designed to leverage the intelligence of Agilent vacuum products. 2 versions: 32-bit and 64-bit versions of Windows.
Support- FAQs
-
- User Manuals
-
Order Information
| Part number | Description |
| 9698839 | T-V1001 NAVIG PUMP.SYS-CFF 10 IN.120/220 |
| 9698930 | Turbo-V1001 Navigator IIN ISO 200 |
| 9698931 | TURBO-V1001 NAVIGATOR PUMP ISO 200 |
| 9698932 | TURBO-V1001 NAVIGATOR PUMP CFF 10in |
| 9698933 | Turbo-V1001 Navigator Pump ISO 160 |
| 9698934 | TURBO-V1001 NAVIGATOR PUMP ISO 250 |
| 9698946 | TURBO-V1001 NAVIGATOR PUMP ISO 200F |
| 9698947 | Turbo-V1001 Navigator Pump ISO 250F |
| 9698978 | TURBO-V1001 NAVIGATOR CONTROLLER |
| 9698978M005 | TURBO-V1001 NAVIGATOR CONTROLLER FOR V1K |
| EX9698931 | EXCH.TURBO-V1001 NAVIGAT.PUMP ISO 200 |
| EX9698932 | EXCH.TURBO-V1001 NAVIGAT.PUMP CF 10in |
| EX9698978 | EXCHANGE V1001 NAVIGATOR CONTR. 120/220V |
| EX9698978M005 | EXCHANGE V1001 NAV. CONTR. FOR V1K |
| Accessories and spare parts | |
| Part Number | Description |
| 9699958 | Mains cable NEMA Plug, 3m long |
| 9699957 | Mains cable European Plug, 3m long |
| 9699883 | Serial cable and Navigator Software |
| 9699304 | Inlet screen ISO 160 |
| 9699316 | Inlet screen ISO 200 |
| 9699825 | Water cooling kit (hose tail G ¼) |
| 9699826 | Water cooling kit (Inox G ¼) |
| 9699108 | Vent flange, NW 10 KF / M8 |
| 9699831 | Vent device with adjustable delay time for standard rack controller |
| 9699843 | Vent valve for standard rack controller |
| 9699834 | Vent valve for Navigator Controller |
| 9699241 | Purge valve KF16-M12 20 SCCM |
| 9699242 | Purge valve 7/16-M12 20 SCCM |
| 9499335 | Rotary Vane pump DS 602, with 1 ph, worldwide motor |
| 9499336 | Rotary Vane pump DS 602, with 3 ph, worldwide motor |
| 9499360 | Rotary Vane pump HS 452, with 1 ph, worldwide motor |
| 9499365 | Rotary Vane pump HS 652, with 1 ph, worldwide motor |
| PTS06001UNIV | Dry pump TriScroll 600, with 1 ph, worldwide motor |
| PTS06003UNIV | Dry pump TriScroll 600, with 3 ph, worldwide motor |
| PTS06001INV | Dry pump TriScroll 600 inverter, with 1 ph, worldwide motor |
| 9698978M005 | Turbo Controller Navigator, 120V-220V for TV-1K-G |
| 9699454M004 | Turbo Controller Rack, 120V-220V for TV-1K-G |