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Hexo Industries (M) Sdn Bhd
1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.
+6011-6528 1088
+604-611 1186
+6012-954 1088
+604-611 1186
+6012-954 1088
+6012-558 2052
+60129541088
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Jalan Putra Bistari 2/5J, 47610 Subang Jaya, Selangor, Malaysia
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Jababeka Bizpark, Blok D/16, Jababeka Innovation Center, Pintu 6, Blok D/16, Cikarang, Bekasi, Jawa Barat 60292, Indonesia.
Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.
Agilent / Varian Turbo-V 3K-G
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Turbo Pumps
Turbo-V 3K-G
The Agilent high throughput turbomolecular pump, Turbo-V 3K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.
This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.
The pump's robust design and its advanced integrated electronics make the Agilent Turbo-V 3K-G the optimum pumping solution for the vacuum coating industry.
Features
Order Information
Literature
Support
Turbo-V 3K-G
The Agilent high throughput turbomolecular pump, Turbo-V 3K-G, is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of Argon under high temperature load.
This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include physical vapor deposition (PVD), solar and flat panel display manufacturing.
The pump's robust design and its advanced integrated electronics make the Agilent Turbo-V 3K-G the optimum pumping solution for the vacuum coating industry.
Features
- The only truly ''integrated'' system on the market
- Highest pumping speeds in its class
- Oil-free, robust and reliable
- MTTF of more than 200,000 hours
- Leading edge rotor design provides significant reduction in weight and mechanical stress
- Patented rotor-shaft fitting eliminates rotor tensile stress
- Utilizes Agilent's A-PLUS software (formerly T-plus)
- Typical Turbo Pump Applications
Specifications
Technical Specifications
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Pumping speed:
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N2: 2200 l/s
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He: 1900 l/s
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Ar: 2050 l/s
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Compression ratio:
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N2: > 1 x 107
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He: 6 x 103
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Ar: > 1 x 108
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Base pressure* (with recommended forepump)
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<1 x 10-8 mbar
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Inlet flange
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ISO 250F
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Foreline flange
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KF 40 NW
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Nominal rotational speed
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31,800 rpm
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Start-up time without gas load and with the recommended forepump
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<6 minutes
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Foreline pressure
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< 0.5 mbar
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Minimum Recommended forepump
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> 60 m3/h (depending on gasflow requirements)
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Operating position
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Any
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Cooling requirements
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Water
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Weight ISO (250)
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52 kg (114.63 lbs)
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* According to standard DIN 28 428.
Order Information
Turbo Pump, Accessories and Spare Parts
| Description | Part number |
| Turbo-V 3K-G ISO 250 F system with integrated purge/vent valves | 9698888 |
| Turbo-V 3K-G T ISO 250 F with ProfiBus and integrated purge/vent valves | 9698889 |
| Mains cable NEMA Plug, 3m long | 9699958 |
| Mains cable European Plug, 3m long | 9699957 |
| Serial cable and A-PLUS Software | 9699883 |
| Inlet screen DIN ISO 250 | 9699350 |
| Protocol Converter RS-232 <-> RS-485 wire | 9699258 |
| Centering ISO 250 | 9699144 |
| Water cooling kit for 6x8 (IDxOD) flexible tube (plastic model) | 9699348 |
| Water cooling kit for 3/8 in. ID flexible tube (metallic model) | 9699338 |
| Turbo-V Remote Panel | 9698850 |
| IP-54 accessory kit – Type 1 | 9698960 |
| Exchange Turbo-V 3K-G ISO 250 F system with integrated purge/vent valves | EX9698888 |
| Exchange Turbo-V 3K-G T ISO 250 F with ProfiBus and integrated purge/vent valves | EX9698889 |
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