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Hexo Industries (M) Sdn Bhd
1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.
+6011-6528 1088
+604-611 1186
+6012-954 1088
+604-611 1186
+6012-954 1088
+6012-558 2052
+60129541088
Selangor Branch
Jalan Putra Bistari 2/5J, 47610 Subang Jaya, Selangor, Malaysia
Indonesia Branch
Jababeka Bizpark, Blok D/16, Jababeka Innovation Center, Pintu 6, Blok D/16, Cikarang, Bekasi, Jawa Barat 60292, Indonesia.
Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.
Agilent / Varian VHS-6 Diffusion Pump
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Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge Contour doubles gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life. Full thermal protection and quick-cool coils are also standard. The 4-inch, 6-inch, and 10-inch pumps can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages.
Features
- Highest pumping speed available.
- Fluid-level sight glass provides a quick indication of pump fluid status at all times.
- Fill and drain assembly for pump oil.
- Fractionating jet purifies pumping fluid.
- High tolerable forepressure.
- Full thermal protection.
- Stainless steel pump body and jet.
- Finned boiler increases surface area, prolonging pumping fluid life.
- Ordering Details
- Download VHS-6 Diffusion Pump 3D Model
Specifications
Technical Specifications
| Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) | 1,550 l/s Air, 1,930 l/s He/H2 2,400 l/s Air |
| Maximum Throughput | 2.4 T-l/s (3.2 mbar-l/s) in operating range, 3.5 T-l/s (4.5 mbar-l/s) @ 0.01 torr |
| Operating Range | 1.5 x 10-3 to <5 x 10-9 torr (2 x 10-3 to < 6.5 x 10-9 mbar) |
| Maximum Forepressure | No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar) |
| Recommended Backing Pump | ≥17 cfm (29 m3/hr) |
| Backstreaming Rate, Standard Cold Cap | <5 x 10-4 mg/cm2/min |
| Warmup Time | 10 minutes |
| Cooldown Time | 10 minutes (with quick cool coil) |
| Fluid Charge | 500 cc – exact fluid charge available |
| Electrical Requirements | 1 ph, 50/60 Hz, 120/208/240 VAC |
| Pump Power | 2200 watts |
| Cooling Water Requirements | 0.25 gpm (50 l/hr) at 60-80°F (15-26°C) |
| Water Connections | 1⁄8 in. FPT Tee |
Flange Type
ASA ISO
VHS-6 Pump
VHS-6 with standard cold cap 120 V 34.0 (75.0) 85826301 L6193301
VHS-6 with extended cold cap 120 V 34.0 (75.0) 85826311 L6193311
VHS-6 with standard cold cap 208 V 34.0 (75.0) 85826306 L6193306
VHS-6 with extended cold cap 208 V 34.0 (75.0) 85826316 L6193316
VHS-6 with standard cold cap 240 V 34.0 (75.0) 85826302 L6193302
VHS-6 with extended cold cap 240 V 34.0 (75.0) 85826312 L6193312
Accessories Page Weight kg (lbs) Part Number
Water-cooled baffle with ASA flanges 31 7.0 (15.0) F8277306
Water-cooled baffle with ISO flanges 31 7.0 (15.0) F8277307
Santovac 5 diffusion pump fluid, 30 1.1 (2.5) 695405005
500 cc (exact pump charge)
Centering ring for ISO inlet flange, 200K 0.5 (1.0) IC200SV
Centering ring for ISO foreline flange, KF50 0.2 (0.5) KC50SV
Installation and Operation Manual 699901022
Replacement Parts (one heater required per pump)
2200 W, 120 V heater 0.5 (1.0) 647306125
2200 W, 208 V heater 0.5 (1.0) 647306175
2200 W, 240 V heater 0.5 (1.0) 647306225
Heater clamping assembly (includes clamping plate, cover plate, insulator) 86643301
Heater cover plate (one required per pump) 1.0 (2.0) 86088001
Heater insulator (one required per pump) 0.2 (0.5) 86087001
Heater clamping plate (one required per pump) 0.5 (1.0) 86086301
VHS-6/250 heater wire, 10 AWG, 0.5 (2.0) X3901-68002
36 inches (3 per pump required)
Replacement o-ring kit (kit contains: 0.5 (1.0) K0377184
3 inlet flange o-rings (butyl 2-267),
3 foreline flange o-rings (butyl 2-332), sight glass o-ring and gasket,
10 fill and drain o-rings (Viton 2-113))
Thermal switch (set at 300 °F – 147 °C) 0.5 (1.0) 642906025
Extended cold cap 31 0.5 (1.0) F6455001
NOTE
- Inlet flange 6 in. ASA , foreline flange 1.5 in. ASA
- Inlet flange ISO 200K, foreline flange ISO KF50
- Pumps with ISO flanges do not include required centering rings