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Hexo Industries (M) Sdn Bhd
1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.
+6011-6528 1088
+604-611 1186
+6012-954 1088
+604-611 1186
+6012-954 1088
+6012-558 2052
+60129541088
Selangor Branch
Jalan Putra Bistari 2/5J, 47610 Subang Jaya, Selangor, Malaysia
Indonesia Branch
Jababeka Bizpark, Blok D/16, Jababeka Innovation Center, Pintu 6, Blok D/16, Cikarang, Bekasi, Jawa Barat 60292, Indonesia.
Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.
Agilent / Varian VHS-250 Diffusion Pump
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Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge Contour doubles gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life. Full thermal protection and quick-cool coils are also standard. The 4-inch, 6-inch, and 10-inch pumps can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages.
Features
Description Voltage Weight kg (lbs) Part Number
VHS-250 pump
VHS-250 with standard cold cap 120 V 34.0 (75.0) K0543301
VHS-250 with standard cold cap 208 V 34.0 (75.0) K0543306
VHS-250 with standard cold cap 240 V 34.0 (75.0) K0543302
Accessories
Santovac 5 diffusion pump fluid, 500 cc 1.1 (2.5) 695405005
(exact pump charge)
Installation and Operation Manual 699901020
Replacement Parts (one heater required per pump)
2200 W, 120 V heater 0.5 (1.0) 647306125
2200 W, 208 V heater 0.5 (1.0) 647306175
2200 W, 240 V heater 0.5 (1.0) 647306225
Heater cover plate (one required per pump) 1.0 (2.0) 86088001
Heater insulator (one required per pump) 0.2 (0.5) 86087001
Heater clamping plate (one required per pump) 0.5 (1.0) 86086301
VHS-6/250 heater wire, 10 AWG, 36 inches 0.5 (2.0) X3901-68002
(3 per pump required)
Replacement o-ring kit (kit contains: 0.5 (1.0) K0377178
3 inlet flange o-rings (butyl 2-379),
3 foreline flange o-rings (butyl 2-332),
sight glass o-ring and gasket,
10 fill and drain o-rings (Viton 2-113))
Thermal switch (set at 300 °F – 147 °C) 0.5 (1.0) 642906025
NOTE
• Inlet flange: ISO 250F (bolted, o-ring seal)
• Foreline flange: ASA with 5 in. OD
- Highest pumping speed available.
- Fluid-level sight glass provides quick indication of pump fluid status at all times.
- Fill and drain assembly for pump oil.
- Fractionating jet purifies pumping fluid.
- High tolerable forepressure.
- Full thermal protection.
- Stainless steel pump body and jet.
- Finned boiler increases surface area, prolonging pumping fluid life.
- Download VHS-250 Diffusion Pump 3D Model
Specifications
Technical Specifications
Ordering Information
Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) | 2,125 l/s Air, 2,660 l/s He/H2 3,700 l/s Air |
Maximum Throughput | 2.6 T-l/s (3.5 mbar-l/s) in operating range, 3.5 T-l/s (4.5 mbar l/s) @ 0.01 torr |
Operating Range | 1.2 x 10-3 to <5 x 10-9 torr (1.6 x 10-3 to <6.5 x 10-9 mbar) |
Maximum Forepressure | No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar) |
Recommended Backing Pump | ≥17 cfm (29 m3/hr) |
Backstreaming Rate, Standard Cold Cap | < 5.0 x 10-4 mg/cm2/min |
Warmup Time | 10 minutes |
Cooldown Time | 10 minutes (with quick cool coil) |
Fluid Charge | 500 cc – exact fluid charge available |
Electrical Requirements | 1 ph, 50/60 Hz, 120/208/240 VAC |
Pump Power | 2200 watts |
Cooling Water Requirements | 0.25 gpm (50 l/hr) |
Water Connections | 1⁄8 in. FPT Tee |
Ordering Information
Description Voltage Weight kg (lbs) Part Number
VHS-250 pump
VHS-250 with standard cold cap 120 V 34.0 (75.0) K0543301
VHS-250 with standard cold cap 208 V 34.0 (75.0) K0543306
VHS-250 with standard cold cap 240 V 34.0 (75.0) K0543302
Accessories
Santovac 5 diffusion pump fluid, 500 cc 1.1 (2.5) 695405005
(exact pump charge)
Installation and Operation Manual 699901020
Replacement Parts (one heater required per pump)
2200 W, 120 V heater 0.5 (1.0) 647306125
2200 W, 208 V heater 0.5 (1.0) 647306175
2200 W, 240 V heater 0.5 (1.0) 647306225
Heater cover plate (one required per pump) 1.0 (2.0) 86088001
Heater insulator (one required per pump) 0.2 (0.5) 86087001
Heater clamping plate (one required per pump) 0.5 (1.0) 86086301
VHS-6/250 heater wire, 10 AWG, 36 inches 0.5 (2.0) X3901-68002
(3 per pump required)
Replacement o-ring kit (kit contains: 0.5 (1.0) K0377178
3 inlet flange o-rings (butyl 2-379),
3 foreline flange o-rings (butyl 2-332),
sight glass o-ring and gasket,
10 fill and drain o-rings (Viton 2-113))
Thermal switch (set at 300 °F – 147 °C) 0.5 (1.0) 642906025
NOTE
• Inlet flange: ISO 250F (bolted, o-ring seal)
• Foreline flange: ASA with 5 in. OD