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Hexo Industries (M) Sdn Bhd
1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.
+6011-6528 1088
+604-611 1186
+6012-954 1088
+604-611 1186
+6012-954 1088
+6012-558 2052
+60129541088
Selangor Branch
Jalan Putra Bistari 2/5J, 47610 Subang Jaya, Selangor, Malaysia
Indonesia Branch
Jababeka Bizpark, Blok D/16, Jababeka Innovation Center, Pintu 6, Blok D/16, Cikarang, Bekasi, Jawa Barat 60292, Indonesia.
Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.
Agilent / Varian VHS-10 Diffusion Pump
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Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge Contour doubles gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life. Full thermal protection and quick-cool coils are also standard. The 4-inch, 6-inch, and 10-inch pumps can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages.
Features
- Highest pumping speed available.
- Fluid level sight glass provides quick indication of pump fluid status at all times.
- Fill and drain assembly for pump oil.
- High throughput, 5100-watt version available.
- Fractionating jet purifies fluid.
- High tolerable forepressure.
- Full thermal protection.
- Stainless steel pump body.
- Ordering Details
- Download VHS-10 Diffusion Pump 3D Model
Specifications
Technical Specifications
| Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) | 3,650 l/s Air, 4,560 l/s He/H2 5,300 l/s Air |
| Maximum Throughput | 6.3 T-l/s (8.4 mbar l/s) in operating range 7.5 T-l/s (10.0 mbar l/s) @ 0.01 torr |
| Operating Range | 1.7 x 10-3 to <5 x 10-9 torr at 4400 W (2.3 x 10-3 to <6.5 x 10-9 mbar) |
| Maximum Forepressure | No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar) |
| Recommended Backing Pump | ≥ 30 cfm (51 m3/hr) |
| Backstreaming Rate, Standard Cold Cap | <5.0 x 10-4 mg/cm2/min |
| Warmup Time | 15 minutes |
| Cooldown Time | 25 minutes |
| Fluid Charge | 1,000 cc |
| Electrical Requirements | 3 ph, 50/60 Hz, 208/240/380/480 VAC |
| Pump Power | 4400 watts |
| Cooling Water Requirements | 0.40 gpm (80 l/hr) |
| Water Connections | 1⁄8 in. FPT Tee |
Ordering Information
Description Wt. kg (lbs) Part Number
ASA ISO
VHS-10 with standard 68 (150) F0426307 L5920307
cold cap, 208 V
VHS-10 with extended 68 (150) F0426317 L5920317
cold cap, 208 V
VHS-10 with standard 68 (150) F0426308 L5920308
cold cap, 240 V
VHS-10 with extended 68 (150) F0426318 L5920318
cold cap, 240 V
Accessories Wt. kg (lbs) Part Number
Water-cooled baffle 9.0 (20.0) F8600310
with ASA flanges
Water-cooled baffle 9.0 (20.0) F8600311
with ISO flanges
Description Wt. kg (lbs) Part Number
Accessories (Cont'd)
Centering ring for ISO foreline 0.5 (1.0) IC063SV
flange, 63K
Installation and Operation Manual 699901023
Replacement Parts (two heaters required per pump)
2200 W, 240 V heater 0.5 (1.0) 647310150
2550 W, 240 V heater 0.5 (1.0) 647310155
Heater crush plate 1.0 (2.0) K7667001
(covers both heaters;
one required for pump; replace when
either heater is replaced)
Heater clamping plate 0.5 (1.0) R2667301
(one required per pump)
VHS-10/400 heater wire, 1.0 (0.4) X3901-68003
10 AWG 42 inches (3 per pump required)
Replacement o-ring kit 1.0 (0.5) K0377185
(kit contains: 1 inlet flange o-ring
(butyl F0430001), 1 foreline flange o-ring
(butyl 2-338), sight glass o-ring and gasket,
10 fill and drain o-rings (Viton 2-113))
Thermal switch 0.5 (1.0) 642906025
(set at 300 °F – 147 °C)
Extended cold cap 2.0 (0.9) L8917301