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Hexo Industries (M) Sdn Bhd
1-2-9, i-Avenue, Medan Kampung Relau 1, 11900 Bayan Lepas, Penang, Malaysia.
+6011-6528 1088
+604-611 1186
+6012-954 1088
+604-611 1186
+6012-954 1088
+6012-558 2052
+60129541088
Selangor Branch
Jalan Putra Bistari 2/5J, 47610 Subang Jaya, Selangor, Malaysia
Indonesia Branch
Jababeka Bizpark, Blok D/16, Jababeka Innovation Center, Pintu 6, Blok D/16, Cikarang, Bekasi, Jawa Barat 60292, Indonesia.
Singapore Branch
SpectrumSense Solutions
1 Scotts Road, #24-10 Shaw Centre, Singapore 228208.
Agilent / Varian VHS-400 Diffusion Pump
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Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge Contour doubles gas capture and maintains lower pressure. All VHS series pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging pumping fluid life. Full thermal protection and quick-cool coils are also standard. The 4-inch, 6-inch, and 10-inch pumps can be ordered with ASA or ISO flanges, standard or extended cold caps, and a variety of voltages.
Features
Description Voltage Weight kg (lbs) Part Number
Flange Type
VHS-400 Pump ASA ISO
VHS-400 with standard cold cap 208V 75.0 (180.0) K4816307 L9767307
VHS-400 with standard cold cap 380 V 75.0 (180.0) K4816326 L9767326
Accessories Page Weight kg (lbs) Part Number
Centering ring for ISO Inlet flange, 400K 0.5 (1.0) IC400SV
Centering ring for ISO foreline flange, 63K 0.5 (1.0) IC063SV
Installation and Operation Manual 699901023
Replacement Parts (two heaters required per pump)
2200 W, 208 V heater 1.0 (0.5) 647310140
2200 W, 240 V heater 1.0 (0.5) 647310150
2550 W, 380 V heater 1.0 (0.5) 647310165
2550 W, 480 V heater 1.0 (0.5) 647310175
Heater crush plate 2.0 (1.0) K7667001
(one required per pump; replace
when either heater is replaced)
Heater clamping plate 1.0 (0.5) R2667301
(one required per pump)
VHS-10/400 heater wire, 10 AWG, 1.0 (0.4) X3901-68003
42 inches (3 per pump required)
Replacement o-ring kit (kit contains: 1.0 (0.5) K0377189
1 inlet flange o-ring (butyl 2-385),
foreline flange o-ring (butyl 2-338), sight glass o-ring and gasket,
10 fill and drain o-rings (Viton 2-113))
Thermal switch (set at 300 °F – 147 °C) 1.0 (0.5) 642906025
NOTE
• Inlet flange ISO 400K, foreline flange ISO 63-K.
• Inlet flange non-standard ASA, foreline flange 2 in. ASA.
• Pumps with ASA flanges include O-Rings for inlet and foreline flanges
• Pumps with ISO flanges do not include centering rings required for inlet and foreline flanges.
Features
- Highest pumping speed available for its height.
- Fluid-level sight glass provides quick indication of pump fluid status at all times.
- Fill and drain assembly for pump oil.
- High throughput, 5100-watt version available.
- Four-stage fractionating jet purifies pumping fluid.
- High tolerable forepressure.
- Full thermal protection.
- Finned boiler increases surface area, prolonging pumping fluid life.
- Quick cool coil is standard.
- Foreline baffle prevents fluid loss into backing system.
- Ordering Details
- Download VHS-400 Diffusion Pump 3D Model
Specifications
Technical Specifications
Technical Specifications
| Pumping Speed, Operating Range Pumping Speed, AVS 4.1 (1963) | 4,500 l/s Air, 5,625 l/s He/H2 8,000 l/s Air |
| Maximum Throughput | 6.3 T-l/s (8.4 mbar l/s) in operating range 7.5 T-l/s (10.0 mbar l/s) @ 0.01 torr |
| Operating Range | 1.4 x 10-3 to <5 x 10-9 torr (1.9 x 10-3 to <6.5 x 10-9 mbar) |
| Maximum Forepressure | No Load: 0.65 torr (0.85 mbar) Full Load: 0.55 torr (0.72 mbar) |
| Recommended Backing Pump | ≥30 cfm (51 m3/hr) |
| Backstreaming Rate, Standard Cold Cap | <1.0 x 10-3 mg/cm2/min |
| Warmup Time | 15 minutes |
| Cooldown Time | 25 minutes |
| Fluid Charge | 1,000 cc |
| Electrical Requirements | 3 ph, 50/60 Hz, 208/380/480 VAC |
| Pump Power | 4400 watts |
| Cooling Water Requirements | 0.40 gpm (80 l/hr) |
| Water Connections |
|
Ordering Information
Description Voltage Weight kg (lbs) Part Number
Flange Type
VHS-400 Pump ASA ISO
VHS-400 with standard cold cap 208V 75.0 (180.0) K4816307 L9767307
VHS-400 with standard cold cap 380 V 75.0 (180.0) K4816326 L9767326
Accessories Page Weight kg (lbs) Part Number
Centering ring for ISO Inlet flange, 400K 0.5 (1.0) IC400SV
Centering ring for ISO foreline flange, 63K 0.5 (1.0) IC063SV
Installation and Operation Manual 699901023
Replacement Parts (two heaters required per pump)
2200 W, 208 V heater 1.0 (0.5) 647310140
2200 W, 240 V heater 1.0 (0.5) 647310150
2550 W, 380 V heater 1.0 (0.5) 647310165
2550 W, 480 V heater 1.0 (0.5) 647310175
Heater crush plate 2.0 (1.0) K7667001
(one required per pump; replace
when either heater is replaced)
Heater clamping plate 1.0 (0.5) R2667301
(one required per pump)
VHS-10/400 heater wire, 10 AWG, 1.0 (0.4) X3901-68003
42 inches (3 per pump required)
Replacement o-ring kit (kit contains: 1.0 (0.5) K0377189
1 inlet flange o-ring (butyl 2-385),
foreline flange o-ring (butyl 2-338), sight glass o-ring and gasket,
10 fill and drain o-rings (Viton 2-113))
Thermal switch (set at 300 °F – 147 °C) 1.0 (0.5) 642906025
NOTE
• Inlet flange ISO 400K, foreline flange ISO 63-K.
• Inlet flange non-standard ASA, foreline flange 2 in. ASA.
• Pumps with ASA flanges include O-Rings for inlet and foreline flanges
• Pumps with ISO flanges do not include centering rings required for inlet and foreline flanges.