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All-Metal UHV Valves Series 54

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Vacuum Valves

All-Metal UHV Valves Series 54

 

Agilent is pleased to offer the all-metal UHV Series 54 valves in partnership with VAT, which are suitable for extreme, ultrahigh vacuum (UHV/XHV). They can be manually operated with a standard hex wrench, so no torque wrench is required.

Thanks to the 'hard-on-hard' metal seals, these valves can operate thousand of items before requiring maintenance. Flex vatring technology enables high sealing forces with comparably low axial forces. Any mounting orientation possible.




X3202-60097 Valve, all metal UHV, 0.75 inch, 1.33 inch ConFlat Flange 1 Each    
X3202-60098 Valve, all metal UHV, right angle, 1.5 inch 1 Each    
X3202-60107 Seal kit, first replacement, all-metal UHV valve series 54, 0.75 inch 1 Kit    
X3202-60108 Seal kit, first replacement, all-metal UHV valve series 54, 1.5 inch 1 Kit    
X3202-60109 Seal kit, second replacement, all-metal UHV valve series 54, 0.75 inch 1 Kit    
X3202-60110 Seal kit, second replacement, all-metal UHV valve series 54, 1.5 inch 1 Kit    

Features

  • Leak rate:
  • Differential pressure on the gate < 2 bar
  • Differential pressure at opening < 1 bar
  • Lifetime >1,000 cycles
  • Bakeout temperature < 300 °C
  • Material AISI 316L
  • Any mounting orientation
  • Conductance NW 16:5 L/s, NW 40: 50 l/sec
  • Convenient operation with a standard hexagon wrench—no torque wrench required
  • Sealing surfaces are only elastically deformed

Literature

Agilent Vacuum Valves

Features, benefits, technical specifications and ordering instructions for Agilent's extensive line of vacuum valves.


UHV All Metal Valves - Series 54

Data sheet for UHV All Metal Valves - Series 54


Agilent Valves by VAT UHV All Metal Valves Series 54 user manual

Instructions for use and technical specifications for the Agilent Valves by VAT UHV All Metal Valves Series 54


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