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ISP Series - Dry Scroll Vacuum Pump, Anest Iwata
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Hexo_Anest_Iwata_vacuum_catalog.pdf (16.11 MB)Hexo_Anest_Iwata_-_ISP_series_dry_scroll_vacuum_pump.pdf (1.94 MB)
- Dry Scroll Pump
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- Anest Iwata
- Vacuum Pump
Anest Iwata ISP Series Oil-Free Dry Scroll Vacuum Pumps
ISP-50, ISP-90, ISP-250C, ISP-500C, ISP-1000Medium vacuum, ultimate pressure 1--20 Pa
Our Japanese-standard quality products
The dry scroll vacuum pumps are used in various vacuum environments, ranging from the accelerator market to the general-purpose vacuum device market.
These pumps provide clean vacuum without back-diffusion of lubricating oil.
They endure repeated continuous operation between atmospheric pressure and vacuum and are capable of continuous operation near atmospheric pressure.
These features make the pumps best-selling models.
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Specifications
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| Model | Motor power (kW) | Pumping Speed (L/min£¨50/60Hz)) | Ultimate Pressure (Pa£¨50/60Hz)) |
Leak tightness (Pa・m3/s) |
Noise level (dB£¨A)) |
|---|---|---|---|---|---|
| ISP-50 | 0.1 | 50/60 | ¨Q20¨Q15 | ¨Q1×10-7 | 48 |
| ISP-90 | 0.15 | 90/108 | ¨Q5 | ¨Q1×10-5 | 52 |
| ISP-250C | 0.4 | 250/300 | ¨Q1.6 | ¨Q1×10-5 | 58 |
| ISP-500C | 0.6 | 500/600 | ¨Q1 | ¨Q1×10-5 | 62 |
| ISP-1000E | 1.4 | 1000/1200 | ¨Q1 | ¨Q1×10-5 | 67 |
Key Features
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Oil-free design – clean, contamination-free vacuum environment.
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Air-cooled system – no cooling water needed, easy installation anywhere.
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Energy efficient – low power consumption from atmosphere down to ultimate pressure.
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Quiet and reliable – low vibration, low noise, high stability.
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High vacuum performance – achieves ultimate pressure up to 1 Pa.
Technology Leadership
Anest Iwata launched the world’s first dry scroll vacuum pump in 1992.
Unlike traditional pumps, the dry scroll vacuum pump does not use oil inside the pump and can continuously exhaust from atmospheric pressure. This breakthrough made clean vacuum technology widely accessible, expanding the global market beyond specialized facilities.
Advantages of the ISP Series
The ISP Series continues Anest Iwata’s legacy of innovation, providing:
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Clean, oil-free operation with no lubricant maintenance.
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Easy, cost-saving installation with an air-cooled system.
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Consistent high performance across semiconductor, industrial, and laboratory use cases.
Applications
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Semiconductor & Coating: sputtering, vacuum deposition, ion plating equipment.
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Advanced Processes: electron beam processing, surface modification, accelerator, synchrotron radiation.
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Thermal Applications: vacuum furnaces, heat treatment furnaces.
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R&D and Testing: laboratory experiments, leak detectors, gas recovery, device handling system.
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Industrial: vacuum packaging machine and other production equipment.
Why Choose Anest Iwata ISP Scroll Pumps?
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Proven Pioneer: inventor of the world’s first dry scroll pump.
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Trusted Japanese Engineering: reliable, precise, and built to last.
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Versatility: ideal for laboratories, semiconductor fabs, industrial plants, and research centers in Malaysia, ASEAN, and worldwide.